Firat, MericMericFiratWouters, LennaertLennaertWoutersLagrain, PieterPieterLagrainHaase, FelixFelixHaasePolzin, Jana-IsabelleJana-IsabellePolzinChaudhary, AdityaAdityaChaudharyNogay, GizemGizemNogayDesrues, ThibautThibautDesruesKrugener, JanJanKrugenerPeibst, RobbyRobbyPeibstTous, LoicLoicTousSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanPoortmans, JefJefPoortmans2022-12-192022-06-102022-12-1920221944-8244WOS:000797959300098https://imec-publications.be/handle/20.500.12860/39939Local Enhancement of Dopant Diffusion from Polycrystalline Silicon Passivating ContactsJournal article10.1021/acsami.2c01801WOS:000797959300098SOLAR-CELLSPOLY-SIBIPOLAR-TRANSISTORSOXIDEPOLYSILICONJUNCTIONSRESOLUTIONMEDLINE:35380425