Visker, JakobJakobViskerHan, YangYangHanVisker, EvertEvertViskerDang Thi Thuy, ChiChiDang Thi ThuyGocyla, MateuszMateuszGocylaHumbert, AurelieAurelieHumbertAckaert, JanJanAckaertPeng, LanLanPengVanhaelemeersch, SergeSergeVanhaelemeersch2023-12-182023-10-232023-12-1820230569-5503WOS:001047624100208https://imec-publications.be/handle/20.500.12860/42911Enabling backside processing for perforated microfluidic devicesProceedings paper10.1109/ECTC51909.2023.00216979-8-3503-3498-2WOS:001047624100208