Compact InAlAs/InGaAs Metal-Semiconductor-Metal Photodetectors Integrated on Silicon-on-Insulator Waveguides

Brouckaert, JoostJoostBrouckaertRoelkens, GuntherGuntherRoelkensVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-162021-10-162007-10https://imec-publications.be/handle/20.500.12860/11812Compact InAlAs/InGaAs Metal-Semiconductor-Metal Photodetectors Integrated on Silicon-on-Insulator WaveguidesJournal article