Substitutional carbon loss in Si:C stressor layers probed by Deep-Level Transient Spectroscopy

Simoen, EddyEddySimoenDhayalan, Sathish KumarSathish KumarDhayalanHikavyy, AndriyAndriyHikavyyLoo, RogerRogerLooRosseel, ErikErikRosseelVrielinck, HemkHemkVrielinckLauwaert, JohanJohanLauwaert2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27313Substitutional carbon loss in Si:C stressor layers probed by Deep-Level Transient SpectroscopyProceedings paperhttp://ecst.ecsdl.org/content/75/4/3.abstract