Direct metal nanowire patterning using ion beam etch

Kundu, ShreyaShreyaKunduDutta, ShibeshShibeshDuttaGupta, AnshulAnshulGuptaJamieson, GeraldineGeraldineJamiesonPiumi, DanieleDanielePiumiBoemmels, JuergenJuergenBoemmelsWilson, ChrisChrisWilsonTokei, ZsoltZsoltTokeiAdelmann, ChristophChristophAdelmann2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28725Direct metal nanowire patterning using ion beam etchMeeting abstracthttp://www2.avs.org/symposium2017/Papers/Paper_PS-WeM13.html