Wang, GangGangWangNguyen, DuyDuyNguyenLeys, MaartenMaartenLeysLoo, RogerRogerLooRichard, OlivierOlivierRichardBrammertz, GuyGuyBrammertzDekoster, JohanJohanDekosterMeuris, MarcMarcMeurisHeyns, MarcMarcHeynsCaymax, MattyMattyCaymax2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18331Growth of high quality InP layers in STI trenches on Si (001) substratesMeeting abstract