Pattern fidelity verification for logic design in EUV lithography

Sugawara, MinoMinoSugawaraHendrickx, EricEricHendrickxPhilipsen, VickyVickyPhilipsenMaloney, ChrisChrisMaloneyFenger, GermainGermainFenger2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24571Pattern fidelity verification for logic design in EUV lithographyProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1863987