Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoKayser, SvenSvenKayserHavelund, RasmusRasmusHavelundGilmore, IanIanGilmoreVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32983Hybrid SIMS: How the orbitrap mass analyzer can improve the self-focusing SIMS concept for advanced semiconductor structuresProceedings paper