Sayan, SafakSafakSayanTao, ZhengZhengTaoChan, BTBTChanDe Simone, DaniloDaniloDe SimoneKuwahara, YuheiYuheiKuwaharaNafus, KathleenKathleenNafusLeeson, Michael J.Michael J.LeesonGstrein, FlorianFlorianGstreinSingh, ArjunArjunSinghVandenberghe, GeertGeertVandenberghe2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25868Dry development rinse process for ultimate resolution Improvement via pattern collapse mitigationProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2238734