Wostyn, KurtKurtWostynMasayuki, WadaWadaMasayukiMichael, AndreasAndreasMichaelKenis, KarineKarineKenisRoussel, PhilippePhilippeRousselBearda, TwanTwanBeardaLeunissen, PeterPeterLeunissenMertens, PaulPaulMertens2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16561Particle removal and damage thresholds from particle removal and damage formation frequency for high-velocity-aerosol cleaningMeeting abstract