In-line resistance measurement of single nanometer-wide trenches and fins

Bogdanowicz, JanuszJanuszBogdanowiczParmentier, BrigitteBrigitteParmentierSchulze, AndreasAndreasSchulzeMoussa, AlainAlainMoussaMerckling, ClementClementMercklingKunert, BernardetteBernardetteKunertGuo, WeimingWeimingGuoPorret, ClémentClémentPorretRosseel, ErikErikRosseelHikavyy, AndriyAndriyHikavyyHansen, OleOleHansenPetersen, D.HD.HPetersenHenrichsen, H.H.H.H.HenrichsenNielsen, P.FP.FNielsenVandervorst, WilfriedWilfriedVandervorst2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26364In-line resistance measurement of single nanometer-wide trenches and finsProceedings paperhttp://ma.ecsdl.org/content/MA2016-02/30/2008.abstract?sid=80731375-a7ac-4481-9572-c20733fd8bdd