Ohyama, HidenoriHidenoriOhyamaNakabayashi, M.M.NakabayashiSimoen, EddyEddySimoenClaeys, CorCorClaeysTanaka, K.K.TanakaKobayashi, K.K.Kobayashi2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/6667Radiation damage of polycrystalline silicon filmsJournal article