Marsik, PremyslPremyslMarsikUrbanowicz, AdamAdamUrbanowiczVerdonck, PatrickPatrickVerdonckDe Roest, DavidDavidDe RoestSprey, HesselHesselSpreyBaklanov, MikhaïlMikhaïlBaklanov2021-10-192021-10-1920110040-6090https://imec-publications.be/handle/20.500.12860/19390Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistanceJournal article