Sub-resolution grating as an option for mask 3D effect mitigation in anamorphic imaging system

Lee, InhwanInhwanLeeFranke, Joern-HolgerJoern-HolgerFrankePhilipsen, VickyVickyPhilipsenRonse, KurtKurtRonseDe Gendt, StefanStefanDe GendtHendrickx, EricEricHendrickx2025-05-172025-05-172025-JAN 11932-5150WOS:001485416800005https://imec-publications.be/handle/20.500.12860/45674Sub-resolution grating as an option for mask 3D effect mitigation in anamorphic imaging systemJournal article10.1117/1.JMM.24.1.011007WOS:001485416800005