Impact of through silicon via induced mechanical stress on fully depleted bulk FinFET technology

Guo, WeiWeiGuoVan der Plas, GeertGeertVan der PlasIvankovic, AndrejAndrejIvankovicCherman, VladimirVladimirChermanEneman, GeertGeertEnemanDe Wachter, BartBartDe WachterTogo, MitsuhiroMitsuhiroTogoRedolfi, AugustoAugustoRedolfiKubicek, StefanStefanKubicekCivale, YannYannCivaleChiarella, ThomasThomasChiarellaVandevelde, BartBartVandeveldeCroes, KristofKristofCroesDe Wolf, IngridIngridDe WolfDebusschere, IngridIngridDebusschereMercha, AbdelkarimAbdelkarimMerchaThean, AaronAaronTheanBeyer, GeraldGeraldBeyerSwinnen, BartBartSwinnenBeyne, EricEricBeyne2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20763Impact of through silicon via induced mechanical stress on fully depleted bulk FinFET technologyProceedings paper