De Meyer, KristinKristinDe MeyerCaymax, MattyMattyCaymaxCollaert, NadineNadineCollaertLoo, RogerRogerLooVerheyen, PeterPeterVerheyen2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2501The vertical heterojunction MOSFETJournal article