Alian, AliRezaAliRezaAlianBrammertz, GuyGuyBrammertzMerckling, ClementClementMercklingFirrincieli, AndreaAndreaFirrincieliWang, Wei-EWei-EWangCaymax, MattyMattyCaymaxMeuris, MarcMarcMeurisDe Meyer, KristinKristinDe MeyerHeyns, MarcMarcHeyns2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18465Passivation of InGaAs surface by ammonium sulfide vapor treatmentProceedings paper