Challenges of Wafer-Scale Integration of 2D Semiconductors for High-Performance Transistor Circuits

Schram, TomTomSchramSutar, SurajitSurajitSutarRadu, IulianaIulianaRaduAsselberghs, IngeIngeAsselberghs2023-01-052022-09-132022-12-022023-01-052022-12-010935-9648WOS:000850640000001https://imec-publications.be/handle/20.500.12860/40421Challenges of Wafer-Scale Integration of 2D Semiconductors for High-Performance Transistor CircuitsJournal article10.1002/adma.202109796WOS:000850640000001Electrical & electronic engineeringintegrationMoS2MX2transition metal dichalcogenideswafer-scaleWS2MEDLINE:36071023