Silicon mircroring resonators surface functionalized with organic and inorganic films for volatile organic compound (VOC) detection

Yebo, Nebiyu A.Nebiyu A.YeboHens, ZegerZegerHensBaets, RoelRoelBaets2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21888Silicon mircroring resonators surface functionalized with organic and inorganic films for volatile organic compound (VOC) detectionProceedings paper