Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

Dumon, PieterPieterDumonBogaerts, WimWimBogaertsWiaux, VincentVincentWiauxWouters, Johan M. D.Johan M. D.WoutersBeckx, StephanStephanBeckxVan Campenhout, JanJanVan CampenhoutTaillaert, DirkDirkTaillaertLuyssaert, BertBertLuyssaertBienstman, PeterPeterBienstmanVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaets2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/8869Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithographyJournal article