Defect analysis of n-type silicon strained layers

Simoen, EddyEddySimoenLoo, RogerRogerLooRoussel, PhilippePhilippeRousselCaymax, MattyMattyCaymaxBender, HugoHugoBenderClaeys, C.C.ClaeysHerzog, H. J.H. J.HerzogBlondeel, A.A.BlondeelClauws, P.P.Clauws2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4754Defect analysis of n-type silicon strained layersOral presentation