The peel-off probe: a cost-effective probe for electrical atomic force microscopy

Hantschel, ThomasThomasHantschelSlesazeck, StefanStefanSlesazeckDuhayon, NatasjaNatasjaDuhayonXu, MingweiMingweiXuVandervorst, WilfriedWilfriedVandervorst2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4417The peel-off probe: a cost-effective probe for electrical atomic force microscopyProceedings paper