Surface reactinivty of AIN thin films with ambient air and water

Ferraro, B.B.B.B.FerraroPobedinskas, PauliusPauliusPobedinskasConings, BertBertConingsBoyen, Hans-GerdHans-GerdBoyenHaenen, KenKenHaenen2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22339Surface reactinivty of AIN thin films with ambient air and waterOral presentation