SiGe MEMS accelerometers combining a large bandwidth with a high capacitive sensitivity

Ray Chaudhuri, AsheshAsheshRay ChaudhuriSeveri, SimoneSimoneSeveriErismis, Mehmet AkifMehmet AkifErismisFrancis, LaurentLaurentFrancisWitvrouw, AnnAnnWitvrouw2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21384SiGe MEMS accelerometers combining a large bandwidth with a high capacitive sensitivityProceedings paperwww.sciencedirect.com