Fatermans, JarmoJarmoFatermansDe Backer, AnnickAnnickDe Backerden Dekker, ArnoldArnoldden DekkerVan Aert, SandraSandraVan Aert2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36705Chapter Six - Atom column detectionBook chapter10.1016/bs.aiep.2021.01.006https://doi.org/10.1016/bs.aiep.2021.01.006