Epitaxial growth and strain relaxation studies of BaTiO3 and BaTiO3/SrTiO3 superlattices grown by MBE on SrTiO3-buffered Si(001) substrate

Merckling, ClementClementMercklingKorytov, MaximMaximKorytovCelano, UmbertoUmbertoCelanoHsu, MarkMarkHsuNeumayer, Sabine M.Sabine M.NeumayerJesse, StephenStephenJesseDe Gendt, StefanStefanDe Gendt2021-10-272021-10-2720190734-2101https://imec-publications.be/handle/20.500.12860/33574Epitaxial growth and strain relaxation studies of BaTiO3 and BaTiO3/SrTiO3 superlattices grown by MBE on SrTiO3-buffered Si(001) substrateJournal articlehttps://doi.org/10.1116/1.5082237