From mean values to distributions of BTI lifetime of deeply scaled FETs through atomistic understanding of the degradation

Toledano Luque, MariaMariaToledano LuqueKaczer, BenBenKaczerFranco, JacopoJacopoFrancoRoussel, PhilippePhilippeRousselGrasser, T.T.GrasserHoffmann, Thomas Y.Thomas Y.HoffmannGroeseneken, GuidoGuidoGroeseneken2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/19896From mean values to distributions of BTI lifetime of deeply scaled FETs through atomistic understanding of the degradationProceedings paper