Evaluating Forksheet FET Reliability Concerns by Experimental Comparison with Co-integrated Nanosheets

Bury, ErikErikBuryVaisman Chasin, AdrianAdrianVaisman ChasinKaczer, BenBenKaczerVandemaele, M.M.VandemaeleTyaginov, S.S.TyaginovFranco, JacopoJacopoFrancoRitzenthaler, RomainRomainRitzenthalerMertens, HansHansMertensWeckx, PieterPieterWeckxHoriguchi, NaotoNaotoHoriguchiLinten, DimitriDimitriLinten2023-06-012023-02-272023-06-0120221541-7026WOS:000922926400100https://imec-publications.be/handle/20.500.12860/41179Evaluating Forksheet FET Reliability Concerns by Experimental Comparison with Co-integrated NanosheetsProceedings paper10.1109/IRPS48227.2022.9764526978-1-6654-7950-9WOS:000922926400100