Falepin, AnneliesAnneliesFalepinCollart, ErikErikCollartTran, SandraSandraTranHarris, MarkMarkHarrisAmeen, MikeMikeAmeenHoffmann, Thomas Y.Thomas Y.HoffmannRosseel, ErikErikRosseelSaino, KantoKantoSainoHoriguchi, NaotoNaotoHoriguchiAbsil, PhilippePhilippeAbsil2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13714Implementation of molecular ion implant technology for PMOS extensionProceedings paper