Ekkels, PhillipPhillipEkkelsRottenberg, XavierXavierRottenbergCzarnecki, PiotrPiotrCzarneckiPhilipsen, HaroldHaroldPhilipsenMertens, RobertRobertMertensPuers, BobBobPuersTilmans, HarrieHarrieTilmans2021-10-192021-10-1920110924-4247https://imec-publications.be/handle/20.500.12860/18865Air gap-based MEMS switch technology using nickel surface micromachiningJournal article