Dubuc, DavidDavidDubucDe Raedt, WalterWalterDe RaedtCarchon, GeertGeertCarchonDo, M. N.M. N.DoFourn, E.E.FournGrenier, KatiaKatiaGrenierPlana, RobertRobertPlana2021-10-162021-10-162005-10https://imec-publications.be/handle/20.500.12860/10405MEMS-IC integration for RF and millimeterwave applicationsProceedings paper