Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

Zhang, LipingLipingZhangde Marneffe, Jean-FrancoisJean-Francoisde MarneffeLukaszewicz, MikolajMikolajLukaszewiczBarry-Porter, StephenStephenBarry-PorterVajda, FelimFelimVajdaSun, YitingYitingSunHeyne, MarkusMarkusHeyneBaklanov, MikhaïlMikhaïlBaklanovRutiqlian, VitoVitoRutiqlian2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24887Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approachesMeeting abstracthttp://www2.avs.org/symposium2014/Papers/Paper_PS-MoM4.html