Preparation of epitaxial films of the transparant conductive oxide Al:ZnO by reactive high-pressure sputtering in Ar/O2 mixtures

Van Gompel, MatthiasMatthiasVan GompelConings, BertBertConingsJiménez-Monroy, Kathia L.Kathia L.Jiménez-MonroyD'Haen, JanJanD'HaenGilissen, KoenKoenGilissenD'Olieslaeger, MarcMarcD'OlieslaegerVan Bael, MarliesMarliesVan BaelWagner, PatrickPatrickWagner2021-10-212021-10-2120131862-6300https://imec-publications.be/handle/20.500.12860/23251Preparation of epitaxial films of the transparant conductive oxide Al:ZnO by reactive high-pressure sputtering in Ar/O2 mixturesJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201200986/abstract