Physics of self-aligned assembly at room temperature

Dubey, VikasVikasDubeyBeyne, EricEricBeyneDerakhshandeh, JaberJaberDerakhshandehDe Wolf, IngridIngridDe Wolf2021-10-252021-10-2520181070-6631https://imec-publications.be/handle/20.500.12860/30656Physics of self-aligned assembly at room temperatureJournal articlehttps://aip.scitation.org/doi/10.1063/1.5004797