An alternative application of ToF-SIMS/in-situ AFM: controlled sample preparation for IC failure analysis

Franquet, AlexisAlexisFranquetSpampinato, ValentinaValentinaSpampinatoKhaled, AhmadAhmadKhaledConard, ThierryThierryConardBrand, SebastianSebastianBrandKogel, MMKogelWiesler, IIWieslerDe Wolf, IngridIngridDe Wolf2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32985An alternative application of ToF-SIMS/in-situ AFM: controlled sample preparation for IC failure analysisOral presentation