Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacks

Arimura, HiroakiHiroakiArimuraRagnarsson, Lars-AkeLars-AkeRagnarssonVeloso, AnabelaAnabelaVelosoAdelmann, ChristophChristophAdelmannDegraeve, RobinRobinDegraeveSchram, TomTomSchramChew, Soon AikSoon AikChewFranco, JacopoJacopoFrancoCho, Moon JuMoon JuChoKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroesenekenHoriguchi, NaotoNaotoHoriguchiThean, AaronAaronThean2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20298Al-induced defect generation in cubic phase HfO2/SiO2/Si gate stacksMeeting abstract