New access to soft breakdown parameters of low k dielectrics through localization-based analysis

Herfurth, NorbertNorbertHerfurthSimon-Najasek, M.M.Simon-NajasekHerfurth, R.R.HerfurthHübner, S.S.HübnerAltmann, FrankFrankAltmannBeyreuther, A.A.BeyreutherAmini, E.E.AminiDe Wolf, IngridIngridDe WolfWu, ChenChenWuCroes, KristofKristofCroesBoit, ChristianChristianBoit2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33128New access to soft breakdown parameters of low k dielectrics through localization-based analysisProceedings paperhttps://ieeexplore.ieee.org/document/8720458