Tabata, ToshiyukiToshiyukiTabataCurvers, BenoitBenoitCurversHuet, KarimKarimHuetChew, Soon AikSoon AikChewEveraert, Jean-LucJean-LucEveraertHoriguchi, NaotoNaotoHoriguchi2021-10-292021-10-2920202168-6734https://imec-publications.be/handle/20.500.12860/360393D simulation for melt laser anneal integration in FinFET's contactJournal articlehttps://ieeexplore.ieee.org/document/9223740