Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) Packaging

Brady-Boyd, AnitaAnitaBrady-BoydChery, EmmanuelEmmanuelCheryArmini, SilviaSilviaArmini2022-11-102022-09-082022-11-1020221948-7185WOS:000848554500001https://imec-publications.be/handle/20.500.12860/40364Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three-Dimensional (3D) PackagingJournal article10.1021/acs.jpclett.2c02080WOS:000848554500001THROUGH-SILICONRELIABILITYMEDLINE:36000826