Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processing

Malhouitre, StephaneStephaneMalhouitreVan Hoeymissen, JanJanVan HoeymissenLe, Quoc ToanQuoc ToanLeKesters, ElsElsKestersGranger, P.P.Granger2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10839Repair and sealing of mesoporous low-k dielectric by supercritical CO2 processingProceedings paper