Engineering of chemical and physical properties of low-k materials by different wavelength of UV light

Baklanov, MikhaïlMikhaïlBaklanovMarsik, PremyslPremyslMarsikVerdonck, PatrickPatrickVerdonckFerchichi, AbdelkarimAbdelkarimFerchichiUrbanowicz, AdamAdamUrbanowiczPrager, L.L.PragerDe Roest, D.D.De RoestMechri, C.C.Mechri2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13332Engineering of chemical and physical properties of low-k materials by different wavelength of UV lightProceedings paper