Integration of ALD WCN into a dual damascene oxide module

Schuhmacher, JörgJörgSchuhmacherBeyer, GeraldGeraldBeyerVos, IngridIngridVosSutcliffe, VictorVictorSutcliffeTokei, ZsoltZsoltTokeiBesling, W.W.BeslingMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/8125Integration of ALD WCN into a dual damascene oxide moduleProceedings paper