A new dummy-free shallow trench isolation concept for mixed-signal applications

Badenes, GonçalGonçalBadenesRooyackers, RitaRitaRooyackersAugendre, EmmanuelEmmanuelAugendreVandamme, EwoutEwoutVandammePerello, CarlesCarlesPerelloHeylen, NancyNancyHeylenGrillaert, JoostJoostGrillaertDeferm, LudoLudoDeferm2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4082A new dummy-free shallow trench isolation concept for mixed-signal applicationsJournal article