Wiaux, VincentVincentWiaux2021-10-182021-10-1820091818-2259https://imec-publications.be/handle/20.500.12860/16537Double-patterning-compliant split and designJournal article10.1117/2.1200902.1430http://spie.org/x33831.xml?highlight=x2402&ArticleID=x33831