Kambham, Ajay KumarAjay KumarKambhamMody, JayJayModyGilbert, MatthieuMatthieuGilbertKoelling, SebastianSebastianKoellingVandervorst, WilfriedWilfriedVandervorst2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/17345Atom probe for FinFET dopant characterizationMeeting abstract