Organic CuTCNQ non-volatile memories for integration in the CMOS backend-of-line: preparation from gas/solid reaction and downscaling to an area of 0.25 μm²

Muller, RobertRobertMullerDe Jonge, StijnStijnDe JongeMyny, KrisKrisMynyWouters, DirkDirkWoutersGenoe, JanJanGenoeHeremans, PaulPaulHeremans2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10915Organic CuTCNQ non-volatile memories for integration in the CMOS backend-of-line: preparation from gas/solid reaction and downscaling to an area of 0.25 μm²Proceedings paper