Integration of a k=2.3 spin-on polymer for the sub-28nm technology node

Wilson, ChrisChrisWilsonLazzarino, FredericFredericLazzarinoTruffert, VincentVincentTruffertKirimura, TomoyukiTomoyukiKirimurade Marneffe, Jean-FrancoisJean-Francoisde MarneffeVerdonck, PatrickPatrickVerdonckHirai, M.M.HiraiNakatani, K.K.NakataniTada, M.M.TadaHeylen, NancyNancyHeylenEl-Mekki, ZaidZaidEl-MekkiVanstreels, KrisKrisVanstreelsVan Besien, ElsElsVan BesienCiofi, IvanIvanCiofiStucchi, MicheleMicheleStucchiCroes, KristofKristofCroesZhang, LipingLipingZhangDemuynck, StevenStevenDemuynckErcken, MoniqueMoniqueErckenXu, KaidongKaidongXuBaklanov, MikhaïlMikhaïlBaklanovTokei, ZsoltZsoltTokei2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/21851Integration of a k=2.3 spin-on polymer for the sub-28nm technology nodeProceedings paper