The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonance

Xue, PanpanPanpanXueZheng, HuifengHuifengZhengLi, WeiyiWeiyiLide Marneffe, Jean-FrancoisJean-Francoisde MarneffeBaklanov, MikhaïlMikhaïlBaklanovAfanasiev, ValeriValeriAfanasievNishi, YoshioYoshioNishiShohet, J.LeonJ.LeonShohet2021-10-232021-10-232015https://imec-publications.be/handle/20.500.12860/26210The effects of VUV radiation on low-k organosilicate glass (SiCOH) as measured with electron-spin resonanceMeeting abstract