Kaczer, BenBenKaczerDegraeve, RobinRobinDegraeveDe Keersgieter, AnAnDe KeersgieterMahmood, SalmanSalmanMahmoodGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152004-04https://imec-publications.be/handle/20.500.12860/9108Impact of gate oxide breakdown of varying hardness on narrow and wide nFETsProceedings paper