Takeuchi, ShotaroShotaroTakeuchiNguyen, DuyDuyNguyenLeys, FrederikFrederikLeysLoo, RogerRogerLooConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorstCaymax, MattyMattyCaymax2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14534Vapor phase doping with N-type dopant into silicon by atmospheric pressure chamical vapor depositionMeeting abstract